Making its debut earlier this month at the Sensors Expo 2012, MEMSIC’s MFA1100R gas flow sensor module exploits both MEMS and proprietary monolithic thermal technologies to achieve high levels of performance and reliability. Eliminating any moving parts, the company’s monolithic thermal technology uses a precise differential temperature measurement to determine flow rate. This approach enables a high dynamic range, higher reliability because there are no mechanisms wearing out, a compact footprint, low power consumption, and a fast response time.
The MFA1100R sensing element is integrated within a monolithic CMOS process together with on-chip signal processing and embedded software. Operating from a 2.7V to 5.5V supply over a flow range of 0 to 100 SLM, the RoHS-compliant module exhibits a startup rate of 0.2 SLM, and a turndown ratio greater than 500:1. Other specs include an accuracy of ±1.5%, a repeatability and hysteresis of better than ±1%, response time better than 100 ms, a continuous operating power of 3 mW, and an operating temperature range from -20°C to +60°C. Of note, the MFA1100R is compatible with a wide range of gasses.
Due to its compact, modular footprint, the MFA1100R integrates easily into wired or wireless systems to create advanced metering infrastructure and smart meter networks. As per John Newton, Vice President of Marketing at MEMSIC, “We have proven the reliability and robustness of the MFA1100R through extensive field trials. We believe the superior reliability, performance and cost of this technology compared with traditional mechanical devices will be disruptive, driving its adoption into a broad range of industrial, medical, and residential flow applications.”