Accelerometer’s 3D structure employs capacitive sensing techniques boasting extremely sensitive measurement characteristics and excellent offset stability.
A new series of analog MEMS accelerometers from Murata, the SCA720, are aimed specifically at electrically controlled suspension (ECS) and engine anti-vibration applications. Measuring 7.0 x 8.6 z 3.3 mm and constructed from a single crystal silicon, the sensor is mechanically robust and has no deformation up to 70,000 g. The accelerometer’s 3D structure employs capacitive sensing techniques that boast extremely sensitive measurement characteristics and excellent offset stability. Internal inert gas damping of the MEMS sensing element provides a mechanical low-pass filter that cuts off above 115 Hz and provide a stable amplitude output and noise filtering. By using an analog output, the device can be placed a good distance away from the controlling unit without any interference to the sensors output, allowing sensors to be placed wherever required. The sensor is earth gravity compensated with a +1 g offset where Vout is +2.5 Vdc. Measurement range is 2.11 g in both directions, providing a Vout in the range from 0 to +5 Vdc. The SCA720 series analog MEMS accelerometers are validated to the automotive component qualification standard AEC-Q100.