Reno Sub-Systems extends solid-state RF lineup at SEMICON West
San Francisco, CA. Reno Sub-Systems, a producer of high-performance RF matching networks, RF power generators, and gas-flow management systems for semiconductor manufacturing, today announced at SEMICON West the latest addition to its Precis Solid-State Generator portfolio. Capable of 1.6-kW microwave output at 2.45 GHz, the new Precis generator offers the highest-power solid-state microwave generator available for semiconductor plasma applications, the company said, adding that its approach to power generation fills a growing need for advanced subsystem technologies to keep the industry on pace with Moore’s law.
The Precis microwave generator delivers accurate, repeatable, and stable microsecond ramp times using a reliable solid-state architecture. The Precis’ microwave power control offers better frequency control than comparable magnetron-based microwave generators, the company said. Eliminating aging magnetron technology also reduces maintenance requirements, and thereby cost of ownership.
The Precis family of generators is the latest addition to Reno’s differentiated Velocity Series EVC matching networks portfolio. Delivering better performance and process capabilities, the Velocity EVC matching network achieves ranges from 500 W to 4.5 kW with frequencies of 500 kHz to 40 MHz.
Precis Microwave Generator specifications:
- 6-kW microwave output at 2.45 GHz
- Operates from 200/208, 3-phase, 50/60-Hz VAC
- Coaxial and waveguide output options
- Serial and analog communication
- DeviceNet and EtherCAT communication options available
- 19″ rack mount design for ease of integration
